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Hard DiskŠÖ˜A»•i ¸–§ƒ|ƒŠƒbƒVƒ… / Precision polisher (planetary) F 13B-10P 4way
–‡—tŽ®Œ¤–‹@ / Ultra polisher (single disk process)
–‡—tŽ®Œ¤í‹@ / Super grinder (single disk process)
–‡—tŽ®ƒ`ƒƒƒ“ƒtƒ@[Œ¤í‹@ / Chamfer grinder (single disk process)
¸–§ôò‹@i½¸×ÌÞ/–ò‰t/’´‰¹”gj / Super cleaner(Scrub/Chemical/Ultrasonic)
•\–ÊŒŸ¸‘•’u / Surface optical inspection F SSI-640
•\–ÊŒ‡Š×‰ðÍ‘•’u / Surface defect analyzer F SDA-102
‚‘¬”ÂŒú‘w•Ê‹@ / High speed thickness sorter

Wafer/LCDŠÖ˜A»•i ƒEƒFƒn[—pƒGƒbƒWŒ¤–‘•’u / Wafer edge-polishing machine F Fine Surface E-200/300
‚R–‡’è”Õ•ûŽ®‚̃‰ƒbƒvEŒ¤–‹@ / Multi-Stage Lapping/Polishing machine F Twin Stage
‰»‡•¨EŽ_‰»•¨ƒEƒF[ƒn—p”–•¨—¼–ÊŒ¤–‹@ / Double side polishing machine F PH1500/1800 Series
‰t»ƒJƒZƒbƒgôò‹@ / ‚k‚b‚c Cassette cleaner
”¼“±‘̃EƒF[ƒn—pƒEƒGƒbƒgƒXƒe[ƒVƒ‡ƒ“ / Wet station for wafer

HardDiskŠÖ˜A»•i
13B-10G/P (4way)
¸–§ƒ|ƒŠƒbƒVƒ… / Precision polisher (planetary)
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  • ƒJƒZƒbƒgtoƒJƒZƒbƒg‚Ì‘SŽ©“®‘•’u
  • 4޲“Æ—§“¯Šú§Œä
  • ¸–§‚ȉÁˆ³§Œä•ûŽ®}0.5g/cm2
  • ‰ÁH¸“x‚ðX‚É‚‚ß‚éã’è”Õ’Ç]‹@\Ì—p
  • “Á‹–Žæ“¾: No.2535089
  • ƒIƒvƒVƒ‡ƒ“‚É‚Äôò‹@‚ðƒCƒ“ƒ‰ƒCƒ“‘•’…‰Â”\
  • Full automation system ( cassette to cassette )
  • 4way synchronous control of carrier motion
  • Precise pressure control }0.5g/cm2
  • High conformity mechanism of upper platen
  • Japan Pat. No.2535089
  • User to choose all options for cleaner

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Ultra Polisher
–‡—tŽ®Œ¤–‹@ / Ultra Polisher (single disk process)
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  • 1ƒJƒZƒbƒg25–‡‚̘A‘±‰ÁH‚ª‰Â”\
  • ’iŽæ‘Ö‚É‚Ä2.5h`3.5h–˜‘Ήž‰Â”\
  • ‰×d‚ð}0.01kgf‚ŧŒä
  • –ʈ³‚ð–ñ50`1000kgf/cm2‚ÆL”͈͂ÉÝ’è‰Â”\ (2.5h)
  • 1–‡’PˆÊ‚̉ÁH‚É‚æ‚èŽdŠ|•i‚ð팸
  • Polishing 25 disks (1 cassette ) continuously
  • Disk size : 2.5h`3.5h ( Option )
  • }0.01kgf control load
  • 50`1000kgf/cm2 polishing pressure can be set (2.5h)
  • Less semi-finished goods by single disk polishing

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Super Grinder
–‡—tŽ®Œ¤í‹@ / Super grinder (single disk process)
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  • ƒp[ƒtƒFƒNƒgƒRƒ“ƒgƒ[ƒ‹
  • Œ¤í’ïR§Œä
  • “u΋OÕ§Œä
  • ƒCƒ“ƒvƒƒZƒX”ÂŒú‘ª’è
  • ‚‰ÁHƒŒ[ƒg
  • ‚•iŽ¿
  • ƒIƒvƒVƒ‡ƒ“‚ɂă[ƒNŽ©“®”À‘—‘Ήž‰Â”\
  • Perfect control
  • Control synchronous locus of grind stone and disks
  • Control disk thickness
  • High grinding rate
  • High quality
  • Automated system with disk transferring system ( Option )

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Chamfer Grinder
–‡—tŽ®ƒ`ƒƒƒ“ƒtƒ@[Œ¤í‹@ / Chamfer grinder (single disk process)
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  • ‚ƒXƒ‹[ƒvƒbƒg
  • ‚‰ÁHƒŒ[ƒg
  • ‚¶ŽY«
  • High throughput
  • High grinding rate
  • High quality

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Super Cleaner
¸–§ôò‹@iƒXƒNƒ‰ƒu/–ò‰t/’´‰¹”gôò‹@j / Super cleaner (Scrub/Chemical/Ultrasonic)
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  • ‘½Ê‚ȃIƒvƒVƒ‡ƒ“Ý’è
  • Ý’èƒIƒvƒVƒ‡ƒ“: ƒXƒNƒ‰ƒuƒ†ƒjƒbƒgA–ò‰tƒ†ƒjƒbƒgA’´‰¹”gƒ†ƒjƒbƒgAŠ£‘‡ƒ†ƒjƒbƒg
  • ƒJƒZƒbƒgtoƒJƒZƒbƒg‚Ì‘SŽ©“®‘•’u
  • ‘OH’ö‚Ƃ̃Cƒ“ƒ‰ƒCƒ“Ú‘±‚ª‰Â”\
  • Various option
  • Option unit : Scrub unit, Chemical unit, Ultrasonic unit & Dry unit
  • Full automation system ( cassette to cassette )
  • Able to couple with other processes

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SS‚h-640
•\–ÊŒŸ¸‘•’u / Surface optical inspection
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  • ŒŸo–Ú“I‚ɉž‚¶‚½ŒõŠwŒn‚ð‘I‘ð‰Â”\
  • ƒJƒZƒbƒgtoƒJƒZƒbƒg‚Ì‘SŽ©“®‘•’u
  • ŒŸ¸Œ‹‰Ê‹y‚ÑŠeŽíWŒvƒf[ƒ^‚ð•\ަAÝ’è‰Â”\
  • ‚ƒXƒ‹[ƒvƒbƒgiSSI-642/640:5•b/–‡j
  • Selectable optimum options for purpose
  • Full automation equipment (Cassette to Cassette )
  • Display and setting of each totaled data of inspection result
  • High throughput (SSI-642/640: 5sec./disk)

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SDA-102
•\–ÊŒ‡Š×‰ðÍ‘•’u / Surface defect analyzer
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  • ƒfƒBƒXƒN•\–ÊŒ‡Š×EŒŸ¸‚ðŽx‰‡‚¢‚½‚µ‚Ü‚·
  • —ÊŽYŒŸ¸‘•’uSSI‚Æ“¯—l‚ÌŒõŠwŒn‚Å\¬‚µ‚½Ž–‚ÅASSI‚É‚æ‚è‘I•Ê‚³‚ꂽŒ‡Š×‰ðÍ‚ª‰Â”\
  • Œ°”÷‹¾‚É‚æ‚錇Š×‰ðÍ‚ª‰Â”\iZygoƒIƒvƒVƒ‡ƒ“‰Â”\j
  • ŒŸo–Ú“I‚ɉž‚¶‚½ŒõŠwŒn‘I‘ð‚ª‰Â”\
  • Helps to inspect and analyze defects on disk surface
  • Same options as (Surface Inspection)SSI, analyzes defects distinguished by SSI
  • Analysis by microscope and Zygo (Zygo option)
  • Selectable optimum optics on analyzing purposes

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Thickness Sorter
‚‘¬”ÂŒú‘w•Ê‹@ / High speed thickness sorter
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  • ”ÂŒú‚Ì‘I•ʸ“x : 1ƒÊm^ƒ‰ƒ“ƒN
  • ”ÂŒú‘ª’è•ûŽ® : ƒŒ[ƒU[•ψʌv
  • ”ñÚGA”ñ”j‰ó‘ª’è•ûŽ®Ì—p
  • Å‚7ƒ‰ƒ“ƒN‘I•ʉ”\ (1ƒ‰ƒ“ƒN‹K’èŠO‚ð—pˆÓ)
  • ƒJƒZƒbƒgtoƒJƒZƒbƒg‚Ì‘SŽ©“®‘•’u
  • ƒKƒ‰ƒX‘Ήž‰Â”\
  • Thickness precision of each level is 1ƒÊm/rank
  • Measuring unit : Laser type instrument
  • Non-contact, Non-destruction measurement
  • Disks can be sorted to 7 ranks (Maximum/1 rank is prepared out of the standard)
  • Full automation system ( cassette to cassette )
  • Glass disk

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»•i‚ÉŠÖ‚·‚邨–â‚¢‡‚킹‚²Ž¿–â / Product inquiries

product@systemseiko.co.jp

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